289920 Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays

28992020 Machines and apparatus used solely or principally for the manufacture of semiconductor boules or wafers 28992040 Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits (excluding machine tools for working any material by removal of material operated by ultrasonic processes) 28992060 Machines and apparatus used solely or principally for the manufacture of flat panel displays