9012 (01/1988-..) Electron microscopes, proton microscopes and diffraction apparatus

90121000 (01/2020-..) Electron microscopes, proton microscopes and diffraction apparatus 90121010 (01/1998-12/2019) Electron microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles 90121090 (01/1998-12/2019) Electron microscopes, proton microscopes and diffraction apparatus (excl. electron microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles) 90129000 (01/2020-..) Parts and accessories for electron microscopes, proton microscopes and diffraction apparatus, n.e.s. 90129010 (01/1998-12/2019) Parts and accessories of electron microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles, n.e.s. 90129090 (01/1998-12/2019) Parts and accessories for electron microscopes, proton microscopes and diffraction apparatus, n.e.s. (excl. of electron microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles) 9013 Liquid crystal devices not constituting articles provided for more specifically in other heading, lasers (excl. laser diodes), other optical appliances and instruments not elsewhere specified in chapter 90